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GTC ON-DEMAND

Presentation
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Abstract:

We'll describe PLDC, a capability embedded inside NuFlare's MBM-1000 multi-beam mask writer that performs semiconductor mask-process correction. PLDC does pixel-level dose correction and improves quality and reliability of shapes printed on the mask. We'll explain how PLDC processes 540 TB of mask data in 10 hours, a feat that would not be possible without advances in GPU computing.

We'll describe PLDC, a capability embedded inside NuFlare's MBM-1000 multi-beam mask writer that performs semiconductor mask-process correction. PLDC does pixel-level dose correction and improves quality and reliability of shapes printed on the mask. We'll explain how PLDC processes 540 TB of mask data in 10 hours, a feat that would not be possible without advances in GPU computing.

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Topics:
Computer-Aided Engineering, Industrial Inspection, Rendering & Ray Tracing
Type:
Talk
Event:
GTC Silicon Valley
Year:
2019
Session ID:
S9735
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